Title |
Anlagenentwicklung und experimentelle Untersuchungen zur Züchtung von CaF2-Kristallen für die Mikrolitographie / vorgelegt von Alexander Molchanov |
|---|---|
Involved |
Alexander Molchanov (Verfasser) |
Published |
2005 |
Extent |
168 S. : Ill., graph. Darst. |
Thesis |
Erlangen, Nürnberg, Univ., Diss., 2005 |
Topic |
|
Subject |
Calciumfluorid, Kristallzüchtung, Fotolithografie (Halbleitertechnologie) |
Record ID |
976487020 |
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