Title |
Micromachining of monocrystalline silicon membranes for sensor applications using porous silicon / Simon Armbruster |
|---|---|
Involved |
Simon Armbruster (Verfasser) |
Published |
Tönning, Lübeck, Marburg: Der Andere Verl. |
Extent |
IV, 150 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Freiburg (Breisgau), Univ., Diss., 2005 |
ISBN |
978-3-89959-407-2 |
Language |
|
Country |
|
Topic |
|
Subject |
MEMS, Halbleiterdrucksensor, Silicium, Poröser Stoff, Membran, Epitaxieschicht |
Record ID |
977313506 |
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