Title |
EMLC 2006 : lectures held at the GMM conference, January 23 - 26, 2006 in Dresden, Germany ; with CD-ROM / 22nd European Mask and Lithography Conference EMLC. Conference chairperson: Uwe Behringer. Organizer: VDE/VDI Society Microelectronics, Micro- and Precision Engineering (GMM). In cooperation with: BACUS ... |
|---|---|
Involved |
EMLC (22, 2006, Dresden) (Verfasser) |
Published |
Berlin, Offenbach: VDE-Verl. |
Extent |
351 S. : Ill., graph. Darst. + 1 CD-ROM |
ISBN |
978-3-8007-2931-9 |
Language |
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Country |
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Topic |
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Subject |
Maskentechnik, Kongress, Dresden <2006> |
Series |
GMM-Fachbericht ; 49 |
Further information |
Literaturangaben |
Record ID |
977899985 |
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