Title |
Ebene Keramiksubstrate und neue Montagetechnologien zum Aufbau hybrid-optischer Systeme / Erik Beckert |
|---|---|
Involved |
Erik Beckert (Verfasser) |
Published |
Berlin: Mensch-und-Buch-Verl. |
Extent |
101 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Ilmenau, Techn. Univ., Diss., 2005 |
ISBN |
978-3-86664-073-3 |
Country |
|
Topic |
|
Subject |
Aluminiumoxidkeramik, Substrat (Mikroelektronik), Herstellung |
Series |
Technics |
Record ID |
980005485 |
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