Title |
Stencil lithography : an ancient technique for advanced micro- and nanopatterning / Marc Antonius Friedrich van den Boogaart |
|---|---|
Involved |
Marc Antonius Friedrich van den Boogaart (Verfasser) |
Published |
Konstanz: Hartung-Gorre |
Edition |
1. ed. |
Extent |
VIII, 181 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Lausanne, Ecole Polytechnique Féd., Diss., 2006 |
ISBN |
978-3-86628-110-3 |
Language |
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Country |
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Topic |
|
Subject |
|
DDC notation |
|
Series |
Series in microsystems ; Vol. 20 |
Record ID |
981428088 |
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