Title |
Ion beam induced pattern formation on Si and Ge surfaces / Bashkim Ziberi |
|---|---|
Involved |
Bashkim Ziberi (Verfasser) |
Published |
Leipzig: Engelsdorfer Verl.***89586 |
Extent |
123 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Leipzig, Univ., Diss., 2006 |
ISBN |
978-3-86703-287-2 |
Language |
|
Country |
|
Topic |
|
Subject |
Silicium, Halbleiteroberfläche, Ionenstrahlbearbeitung, Musterbildung |
DDC notation |
|
Record ID |
983382271 |
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