Title |
Untersuchungen zum Dünnen und Vereinzeln dünner Silizium-Wafer / von Gerald Günzel |
|---|---|
Involved |
Gerald Günzel (Verfasser) |
Published |
Tönning, Lübeck, Marburg: Der Andere Verl. |
Extent |
XVII, 134 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Hannover, Univ., Diss., 2007 |
ISBN |
978-3-89959-580-2 |
Language |
|
Country |
|
Topic |
|
Subject |
Siliciumbauelement, Dünne Schicht, Wafer, Elektropolieren, Trennschleifen |
DDC notation |
|
Record ID |
983516103 |
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