Title |
EMLC 2007 : lectures held at the GMM conference, January 22 - 26, 2007 in Grenoble, France / 23rd European Mask and Lithography Conference ... Uwe Behringer, conference chair, ed. ... |
|---|---|
Involved |
Uwe Behringer (Mitwirkender) |
Published |
Berlin, Offenbach: VDE-Verl. |
Extent |
1 CD-ROM : farb. |
ISBN |
978-3-8007-3032-2 |
Language |
|
Country |
|
Topic |
|
Subject |
Maskentechnik, Kongress, Grenoble <2007>, CD-ROM |
DDC notation |
|
Series |
Proceedings / SPIE, International Society for Optical Engineering : P ; Vol. 6533 |
Further information |
Titel auf dem Behältnis |
Record ID |
984554947 |
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