Title |
Modeling for Chemical Vapor Deposition |
|---|---|
Involved |
Jürgen Geiser (Verfasser) |
Published |
Berlin: Inst. für Mathematik |
Subject |
Chemical vapor deposition |
Series |
Preprint ; 2007,17 |
Other editions |
Erscheint auch als Online-Ausgabe: Modeling for Chemical Vapor Deposition |
Record ID |
988033445 |
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