Title |
EMLC 2008 : lectures held at the GMM conference, January 21 - 24, 2008 in Dresden, Germany ; proceedings / 24th European Mask and Lithography Conference ... Uwe Behringer, conference chair, ed. ... |
|---|---|
Involved |
Uwe Behringer (Mitwirkender) |
Published |
Berlin, Offenbach: VDE-Verl. |
Extent |
1 CD-ROM |
ISBN |
978-3-8007-3079-7 |
Language |
|
Country |
|
Topic |
|
Subject |
Maskentechnik, Kongress, Dresden <2008>, CD-ROM |
DDC notation |
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Further information |
Titel auf dem Behältnis |
Record ID |
988058995 |
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