Title |
Materialbasierte Modellierung der Genauigkeit mikromechanischer Drucksensoren / Erik Julius Deier |
|---|---|
Involved |
Erik Julius Deier (Verfasser) |
Published |
Tönning, Lübeck, Marburg: Der Andere Verl. |
Extent |
III, 128 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Freiburg (Breisgau), Univ., Diss., 2008 |
ISBN |
978-3-89959-752-3 |
Language |
|
Country |
|
Topic |
|
Subject |
Halbleiterdrucksensor, Verbindungstechnik, Mikrokleben, Klebeverbindung, Thermomechanische Eigenschaft, Messgenauigkeit |
DDC notation |
|
Series |
MEMS technology and engineering ; Vol. 8 |
Record ID |
989056392 |
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