Title |
Multi-target sputtering technology of Pb(Zr,Ti)O3 thin films for electron devices / Vinay Shankar Vidyarthi |
|---|---|
Involved |
Vinay Shankar Vidyarthi (Verfasser) |
Published |
Dresden: TUDpress |
Extent |
XVIII, 192 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Dresden, Techn. Univ., Diss., 2008 |
ISBN |
978-3-941298-03-3 |
Language |
|
Country |
|
Topic |
|
Subject |
|
DDC notation |
|
Series |
Dresdner Beiträge zur Sensorik ; Bd. 34 |
Record ID |
991847997 |
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