Title |
Hochempfindliche resonante Gassensoren auf der Basis von einkristallinen Silizium-Plattenschwingern / vorgelegt von Jan Grahmann |
|---|---|
Involved |
Jan Grahmann (Verfasser) |
Published |
München: Verl. Dr. Hut |
Edition |
1. Aufl. |
Extent |
172 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Chemnitz, Techn. Univ., Diss., 2008 |
ISBN |
978-3-89963-837-0 |
Language |
|
Country |
|
Topic |
|
Subject |
Gassensor, Gravimetrischer Sensor, Platte, Oszillator, Siliciumbauelement, Mikromechanik |
DDC notation |
|
Series |
Ingenieurwissenschaften |
Record ID |
992162815 |
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