Title |
Magnetronsputtern von hochleitfähigen ZnO:Al-Schichten für die Photovoltaik / Florian Ruske |
|---|---|
Involved |
Florian Ruske (Verfasser) |
Published |
Stuttgart: Fraunhofer-IRB-Verl. |
Extent |
XIII, 186 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Gießen, Univ., Diss., 2009 |
ISBN |
978-3-8167-7985-8 |
Language |
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Country |
|
Topic |
|
Subject |
Dünnschichtsolarzelle, Silicium, Transparent-leitendes Oxid, Zinkoxid, Reaktives Sputtern, Magnetronsputtern |
DDC notation |
|
Series |
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Record ID |
993460631 |
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