Title |
Inkjet printing and high aspect ratio structuring for polymer-based micro and nano systems / Vahid Fakhfouri |
|---|---|
Involved |
Vahid Fakhfouri (Verfasser) |
Published |
Konstanz: Hartung-Gorre |
Edition |
1. ed. |
Extent |
IV, 148 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Lausanne, Ecole Polytechnique Féd., Diss., 2009 |
ISBN |
978-3-86628-284-1 |
Language |
|
Country |
|
Topic |
|
Subject |
Mikrofertigung, Funktionswerkstoff, MEMS, Tintenstrahldruck, Spritzgießen, Fotolithografie (Halbleitertechnologie), Photopolymerisation, Nanotechnologie |
DDC notation |
|
Series |
Series in microsystems ; Vol. 26 |
Record ID |
997891130 |
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