Title |
Schallwandler in Silizium-Technologie / Kathrin van Teeffelen |
|---|---|
Involved |
Kathrin van Teeffelen (Verfasser) |
Published |
Aachen: Shaker |
Extent |
146 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Saarbrücken, Univ., Diss., 2009 |
ISBN |
978-3-8322-8657-6 |
Language |
|
Country |
|
Topic |
|
Subject |
Kondensatormikrofon, MEMS, Technische Membran, Opferschicht, Siliciumdioxid, Herstellung |
DDC notation |
|
Series |
Aktuelle Berichte aus der Mikrosystemtechnik = Recent developments in MEMS ; Bd. 9 |
Other editions |
Erscheint auch als Online-Ausgabe: Schallwandler in Silizium-Technologie |
Record ID |
998456497 |
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